Study of Inductive Coupled Hydrogen and Argon Plasma Interaction with SiO2 Glass
Plasma Processes and Polymers
2009
Zanda Gavare,
Gita Rēvalde,
Atis Skudra,
Natalia Zorina
This work is devoted to the diagnostics of interaction between hydrogen and argon with the surface of SiO2 glass walls. For diagnostics of the interaction, special high-frequency electrodeless light sources were prepared, filled with pure argon of 1 Torr or argon-hydrogen of total pressure of 1 Torr (Ar/H2 mixing ratio is 9:1).
DOI
10.1002/ppap.200930508
Hyperlink
http://onlinelibrary.wiley.com/doi/10.1002/ppap.200930508/pdf
Gavare, Z., Rēvalde, G., Skudra, A., Zorina, N. Study of Inductive Coupled Hydrogen and Argon Plasma Interaction with SiO2 Glass. Plasma Processes and Polymers, 2009, Vol.6, Iss. Suppl.1, pp.183-186. ISSN 1612-8850. Available from: doi:10.1002/ppap.200930508
Publication language
English (en)