Investigation of Method of Ion Vacuum Deposition

Mechanical Engineering and Mechanics 2012
Natālija Bulaha, Tatjana Fiļipova

This article describes a vacuum ion deposition , which is characterized, mainly, by bombarded particles energy, which determines coating quality and options. This method is divided into two sub-groups: ion-beam and ion-plasma deposition. Ion deposition ensures a coating uniform infliction, process implementation at low temperatures and opportunity to get the refractory coating as well.

Keywords
Deposition, bombarded ions, electron emission, reactionary gas

Bulaha, N., Fiļipova, T. Investigation of Method of Ion Vacuum Deposition. In: Mechanical Engineering and Mechanics. Rīga: Riga Technical University, 2012, pp.36-39. ISBN 978-9984-9990-7-4.

Publication language
English (en)