Investigation of Method of Chemical Vapor Deposition

Mechanical Engineering and Mechanics 2012
Natālija Bulaha, Tatjana Fiļipova

This article describes the method of chemical vapor deposition, in order to determine the physical and chemical nature of the process, the possibility of coatings application at different operating temperatures and restrictions on use. This method allows to obtain high-quality and very different in composition coatings, which make the method of chemical vapor deposition quite relevant and meaningful.

Keywords
Evaporation, coating, precursor, thermolysis

Bulaha, N., Fiļipova, T. Investigation of Method of Chemical Vapor Deposition. In: Mechanical Engineering and Mechanics. Rīga: Riga Technical University, 2012, pp.48-51. ISBN 978-9984-9990-7-4.

Publication language
English (en)