Investigation of Method of Physical Vapour Deposition

Production Engineering : Nanotehnology, Surface 3D Roughness, Vacuum Chamber 2012
Tatjana Fiļipova, Natālija Bulaha

The base of this work is investigation of method of physical vapor deposition: physical processes essence, underlying this method, variants of method realization, depending on working conditions, used equipment types, its working principles, multiformity and using, acquired coatings exploration and evaluating, coatings usage possibilities.

Keywords
Deposition, evaporation, vacuum, condensation

Fiļipova, T., Bulaha, N. Investigation of Method of Physical Vapour Deposition. In: Production Engineering : Nanotehnology, Surface 3D Roughness, Vacuum Chamber. Riga: Riga Technical University, 2012, pp.50-54. ISBN 978-9984-9990-6-7.

Publication language
English (en)