Influence of Ionizing Radiation on the Si3N4 Coatings on Si Substrate
19th International Conference-School "Advanced Materials and Technologies 2017": Book of Abstracts
2017
Liga Avotina,
Roberts Zarins,
Elina Pajuste,
Marina Romanova,
Juris Bitenieks,
Jānis Zicāns,
Aleksandrs Zaslavskis,
Jurijs Dehtjars,
Gunta Kizane
To use the Si3N4 as insulating layer in capacitors for space applications, it is important to estimate behaviour of these layers under action of ionizing radiation.
Keywords
silicon nitride, nanocapacitor, dielectric nanolayer, ionizing radiation
Avotina, L., Zarins, R., Pajuste, E., Romanova, M., Bitenieks, J., Zicāns, J., Zaslavskis, A., Dehtjars, J., Kizane, G. Influence of Ionizing Radiation on the Si3N4 Coatings on Si Substrate. In: 19th International Conference-School "Advanced Materials and Technologies 2017": Book of Abstracts, Lithuania, Palanga, 27-31 August, 2017. Kaunas: 2017, pp.80-80. ISSN 1822-7759.
Publication language
English (en)