Multi-Criterial Assessment of the Uniformity of the Electrical Potential of Micro-Films

2019 International Conference on Applied Electronics (AE 2019) 2019
Horia Nicolai Teodorescu, Victor Cojocaru, Aleksejs Kataševs

We propose a method of characterization and assessment of the uniformity of the surface properties of samples based on a set of derived parameters. Local (sliding window) variance, Allan and Hadamard variances and centers of potential for measurement lines are used to assess the uniformity. The method is exemplified for the potential of piezoelectric thin (nano) films, but it is applicable to a large range of properties.

Keywords
Allan and Hadamard variances, Correlational analysis, Surface properties, Uniformity assessment
DOI
10.23919/AE.2019.8867010
Hyperlink
https://ieeexplore-ieee-org.resursi.rtu.lv/document/8867010

Teodorescu, H., Cojocaru, V., Kataševs, A. Multi-Criterial Assessment of the Uniformity of the Electrical Potential of Micro-Films. In: 2019 International Conference on Applied Electronics (AE 2019), Czech Republic, Pilsen, 10-11 September, 2019. Piscataway: IEEE, 2019, pp.173-176. ISBN 978-1-5386-8054-4. e-ISBN 978-8-0261-0812-2. ISSN 1803-7232. Available from: doi:10.23919/AE.2019.8867010

Publication language
English (en)