Sputtered SiOxNy Thin Films-Improving Optical Efficiency of Liquid Crystal Diffuser Elements in Multi-Focal Near-to-Eye Display Architecture

Proceedings of SPIE. Vol.11872: Advances in Optical Thin Films VII 2021
Andris Ozols, Gatis Mozoļevskis, Edvīns Ļetko, Mārtiņš Rutkis, Roberts Zābels, Elīna Liniņa, Imants Osmanis

The problem of liquid crystal diffuser elements optimization ir experimentally studied. It is found that sputtered SiOxNy thin films significantly improve the optical efficiency of these elements. This is important for multi-focal near-to-eye displays.

Keywords
Augmented Reality; Reactive sputtering; Silicon Oxynitride; Thin films
DOI
10.1117/12.2596885
Hyperlink
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11872/118720I/Sputtered-SiOxNy-thin-films--improving-optical-efficiency-of-liquid/10.1117/12.2596885.short

Ozols, A., Mozoļevskis, G., Ļetko, E., Rutkis, M., Zābels, R., Liniņa, E., Osmanis, I. Sputtered SiOxNy Thin Films-Improving Optical Efficiency of Liquid Crystal Diffuser Elements in Multi-Focal Near-to-Eye Display Architecture. No: Proceedings of SPIE. Vol.11872: Advances in Optical Thin Films VII, Spānija, Online, 13.-18. septembris, 2021. Bellingham: SPIE, 2021, Article number 118720I. ISBN 978-151064588-2. ISSN 0277-786X. e-ISSN 1996-756X. Pieejams: doi:10.1117/12.2596885

Publication language
English (en)