Irradiation of the Graphite-Like Carbon Films by Ns-Laser Pulse

Applied Surface Science 2012
L. Marcinauskas, A. Grigonis, P. Valatkevicius, Artūrs Medvids

The effect of a nanosecond laser irradiation of graphite-like carbon (GLC) films deposited on Si substrate by the plasma jet technique was analyzed in this work. The GLC coatings were irradiated by the nanosecond Nd:YAG lasers operating at 1064 nm (infrared (IR) radiation) and 532 nm (visible (VIS) radiation), using a multi-shot regime. The laser irradiations lead to the surface ablation and partial disarrangement of the GLC coatings. The IR laser irradiation stimulates an increase in the fraction of the sp 2 carbon bonds and formation of the nano-graphite cluster. The formation of SiC and graphite nanocrystallites was observed after VIS laser radiation by 24 MW/cm 2 energy density. FTIR results demonstrated that the reflectance of the laser irradiated carbon films decreases. © 2012 Elsevier B.V. All rights reserved.

Atslēgas vārdi
Graphite-like carbon; Laser irradiation; Raman spectroscopy
DOI
10.1016/j.apsusc.2012.08.042

Marcinauskas, L., Grigonis, A., Valatkevicius, P., Medvids, A. Irradiation of the Graphite-Like Carbon Films by Ns-Laser Pulse. Applied Surface Science, 2012, Vol.261, 488.-492.lpp. ISSN 0169-4332. Pieejams: doi:10.1016/j.apsusc.2012.08.042

Publikācijas valoda
English (en)