Au nanoparticles (AuNPs) have much inter-est based on surface plasmon resonance (SPR) and play an important role in a variety of sensors, such as biological, medical, chemical, and optoelectronic applications [1]. The applications require controllable AuNPs distribution on substrates for perfor-mance improvement. Recently, it is shown that size distribution of AuNPs formed by annealing in furnace increase with thickness of Au films [2]. The size of AuNPs formed by laser radiation also depends on thickness of Au film but independends on laser inten-sity [3]. The aim of this research is to show the pos-sibility to form AuNPs by laser radiation with controled size and concentration which leads to change the position of SPR peak in absorption spectra. Au film with 1.4 nm thickness on the boro-silicate glass structure formed by thermal evaporation in vacuum was used in the ex-periment. Parameters of Nd:YAG laser radia-tion to form AuNPs are as follows: wave-length λ= 1064 nm, pulse duration τ= 6 ns and repetition rate of 10 Hz were used. The structure was irradiated with the intensities in the range of 75–180 MW/cm2. The scanning electron microscopy (SEM) and spectropho-tometer were used as main investigation tools. The size of AuNPs increases with laser intensity, as shown in Fig. 1 and Fig. 2 inset. Increase of nanoparticles size leads to red-shift of SPR peak in absorption spectra, as shown in Fig. 2. Redshift of SPR peak de-pending on AuNPs size was pointed out in paper [2]. In our experiments, the possibility to control of particles size and their concen-tration which leads to redshift of SPR spectra were succeeded.