The paper analyses SiO2 vacuum nano coating technological process and its influence on coating quality and properties. Use of fuzzy logic is proposed to develop a process prediction models for vacuum coating. Several experiments were designed and conducted using UV80 laboratory vacuum system, wherein SiO2 coating light transmission coefficient and thickness were measured. SiO2 nano coating light transmission and thickness predictions models were designed using fuzzy logic techniques. After preliminary analysis it was concluded that models developed by fuzzy logic have high accuracy and can be used to predict SiO2 vacuum nano coating properties if a leak in vacuum system appears during technological process, thus enabling continuation of the technological process as long as coating properties will match selected criteria.