The Influence of Nanosecond Pulse Laser Irradiation on the Properties of a-C:H Films

Vacuum 2008
A. Grigonis, Z. Rutkuniene, Artūrs Medvids

Plasma-deposited amorphous hydrogenated carbon (a-C:H) films are determined both by the carbon sp3/ sp2 bonding ratio and the hydrogen content. As the energy of the bonds C–H (C–C) is considerably smaller than that of C=C bond, so the hydrogen concentration and the physical properties of a- C:H films can be varied by laser irradiation. The properties of produced films were investigated by Rutherford backscattering (RBS) and elastic recoil detection (ERD) spectroscopy, null-ellipsometry, and Raman spectroscopy (RS). It was found that films with higher hydrogen concentration are more sensitive to nanosecond pulse laser irradiation.

Atslēgas vārdi
Amorphous hydrogenated carbon films, Laser irradiation, Raman spectroscopy, Rutherford backscattering spectroscopy, elastic recoil detection spectroscopy
DOI
10.1016/j.vacuum.2008.02.001
Hipersaite
http://www.sciencedirect.com/science/article/pii/S0042207X08000894

Grigonis, A., Rutkuniene, Z., Medvids, A. The Influence of Nanosecond Pulse Laser Irradiation on the Properties of a-C:H Films. Vacuum, 2008, Vol.82, Iss.11, 1212.-1215.lpp. ISSN 0042-207X. Pieejams: doi:10.1016/j.vacuum.2008.02.001

Publikācijas valoda
English (en)