Self-Assembly of Nanohills in SiGe/Si Heteroepitaxial Structure due to Ge Redistribution Induced by Laser Radiation
International Conference “Functional Materials and Nanotechnologies”: Book of Abstract 2008
N. Dmytruk, I. Dmytruk, E. Kasper, O. Kondratenko, K. Lyutovich, Artūrs Medvids, M. Oehme, Pāvels Onufrijevs, I. Pundyk

For the first time observed self-assembling nanohills induced by irradiation of nanosecond Nd:YAG laser pulses (pulse duration 15 ns; wavelength 1062 nm; power 1MW) in the SiGe/Si heteroepitaxial structures with initially uniform distribution of Ge atoms over the top layer is reported. The Photoluminescence band at 700-800 nm the maximum of which shifting to shorter wavelengths with the increase of the intensity of laser radiation and appearance of the 300 cm-1 Ge-Ge vibration band in micro-Raman spectra are explained by the Quantum confinement effect in nanohills. An AFM study of the morphology of irradiated surface has shown formation of particularly-oriented nanohills after laser irradiation of the intensity 32 MW/cm2. Ellipsometry data confirmed appearance of Ge-rich phase precipitates amounting to 4.6% and 2.1% of the total Ge content induced by laser radiation of intensities 32 MW/cm2 and 25 MW/cm2, respectively. Formation of the Ge-rich phase is explained by localization of Ge atoms drifting toward the irradiated surface under the thermal gradient due to strong absorption of the laser radiation.


Atslēgas vārdi
SELF-ASSEMBLY, NANOHILLS, SiGe/Si, HETEROEPITAXIAL STRUCTURE

Dmytruk, N., Dmytruk, I., Kasper, E., Kondratenko, O., Lyutovich, K., Medvids, A., Oehme, M., Onufrijevs, P., Pundyk, I. Self-Assembly of Nanohills in SiGe/Si Heteroepitaxial Structure due to Ge Redistribution Induced by Laser Radiation. No: International Conference “Functional Materials and Nanotechnologies”: Book of Abstract, Latvija, Riga, 1.-4. aprīlis, 2008. Riga: Institute of Solid State Physics, 2008, 49.-49.lpp.

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