Aluminum doped zinc oxide (ZnO:Al) is an attractive inexpensive material for transparent conductive electrodes and IR reflective coatings. ZnO:Al layers were deposited on 100 μm thick PET (polyethylene terephthalate) film by magnetron sputtering of ZnO/Al2O3 2 wt.% planar ceramic target (225x100) mm2 in Ar/H2 atmosphere under (1–5).10-3 Torr pressure in the vacuum chamber. RF (13.56 MHz) and DC power sources were used separately. The PET film was fixed on a rotated water-cooled drum. The substrate surface was cleaned by an ion gun before ZnO deposition. As a result ZnO layers on the PET film of conductivity 7 x 10-4 Ω.cm (RF-source) and 1.3 x 10-3 Ω.cm (DC-source) were obtained. The best samples have optical transmittance (82-83)% for λ (360-600) nm and ZnO thickness (350-400) nm. The layers are crack-free and have good adhesion to the substrate.