Nowadays the flexible electronic applications develop rapidly and it is important to choose the correct measuring techniques to analyze the mechanical properties of a harder top layer material on a softer substrate in nanometre range. In this paper, indium tin oxide coating on PET film is discussed. The coating was deposited by reactive magnetron sputtering in a roll-to-roll vacuum coater. Nano scratch tests and nano indentation tests were carried out on samples with different coating thicknesses. The influence of coating thickness to delamination process (important factor for adhesion) and load/penetration depth curves is established and different phenomenon are discovered.