Physical Properties of Gallium Doped Zinc Oxide Coating on Two Different Roll to Roll Substrates
6th International Conference "Mechatronic Systems and Materials": Abstracts 2010
Ingūna Strazdiņa, Jānis Rudzītis

Mechatronic systems very often are connected with application of new materials, created in micro process engineering as special coatings. In this paper Gallium doped Zinc oxide (GZ0) coating made by magnetron sputtering is discussed. During coating deposition 1-6 sccm of hydrogen was added in the atmosphere of the vacuum chamber. Coatings were deposited on a two polymeric films: polyethylene terephthalate (PET) and polyethylene naphthalate (PEN) in continuous process in roll-to-roll vacuum machine. On the basis of measurement of electric and optical properties of coatings and the analysis of coating roughness and morphology measured by atomic force microscope influence of additive hydrogen on electrical and optical properties of coatings and crystal structure of a coatings is established.


Atslēgas vārdi
Transparent conductive oxide, magnetron spattering

Strazdiņa, I., Rudzītis, J. Physical Properties of Gallium Doped Zinc Oxide Coating on Two Different Roll to Roll Substrates. No: 6th International Conference "Mechatronic Systems and Materials": Abstracts, Polija, Opole, 5.-8. jūlijs, 2010. Opole: Opole University of Technology, 2010, 190.-190.lpp.

Publikācijas valoda
English (en)
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