Mechatronic systems very often are connected with application of new materials, created in micro process engineering as special coatings. In this paper Gallium doped Zinc oxide (GZ0) coating made by magnetron sputtering is discussed. During coating deposition 1-6 sccm of hydrogen was added in the atmosphere of the vacuum chamber. Coatings were deposited on a two polymeric films: polyethylene terephthalate (PET) and polyethylene naphthalate (PEN) in continuous process in roll-to-roll vacuum machine. On the basis of measurement of electric and optical properties of coatings and the analysis of coating roughness and morphology measured by atomic force microscope influence of additive hydrogen on electrical and optical properties of coatings and crystal structure of a coatings is established.